31
TITLE: Sputtering preparation of silicon nitride thin films for gate dielectric applications
AUTHORS: Pereira, L ; Aguas, H ; Igreja, R ; Martins, RMS ; Nedev, N; Raniero, L; Fortunato, E ; Martins, R ;
PUBLISHED: 2004, SOURCE: 2nd International Materials Symposium in ADVANCED MATERIALS FORUM II, VOLUME: 455-456
INDEXED IN: Scopus WOS
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