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TITLE: Versatile reactor for LCVD large films production  Full Text
AUTHORS: Conde, O ; Deus, AM ; Ferreira, MLG; Silvestre, AC;
PUBLISHED: 1989, SOURCE: Selected Proceedings of the 1st Iberian Meeting on Vacuum and Its Applications in Vacuum, VOLUME: 39, ISSUE: 7-8
INDEXED IN: Scopus
Page 7 of 7. Total results: 61.