Sergej Filonovich
AuthID: R-000-GDQ
11
TITLE: Optimization of Deposition Parameters for Thin Silicon Films on Flexible Substrates in a Hot-Wire Chemical Vapor Deposition Reactor
AUTHORS: Pedro Alpuim; Ribeiro, M; Sergej Filonovich;
PUBLISHED: 2006, SOURCE: Materials Science Forum - MSF, VOLUME: 514-516
AUTHORS: Pedro Alpuim; Ribeiro, M; Sergej Filonovich;
PUBLISHED: 2006, SOURCE: Materials Science Forum - MSF, VOLUME: 514-516