S. Koynov
AuthID: R-006-KM7
31
TITLE: Closed-chamber chemical vapor deposition: New cyclic method for preparation of microcrystalline silicon films
AUTHORS: Svetoslav Koynov; Reinhard Schwarz; Thomas Fischer; Stefan Grebner; Herbert Muender;
PUBLISHED: 1994, SOURCE: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, VOLUME: 33, ISSUE: 8
AUTHORS: Svetoslav Koynov; Reinhard Schwarz; Thomas Fischer; Stefan Grebner; Herbert Muender;
PUBLISHED: 1994, SOURCE: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, VOLUME: 33, ISSUE: 8
INDEXED IN: 
Scopus
Scopus32
TITLE: Properties and stability of hydrogenated amorphous silicon films with a low hydrogen content prepared by cyclic chemical vapour deposition and hydrogenation Full Text
AUTHORS: Koynov, S; Schwarz, R; Fischer, T; Schorer, R;
PUBLISHED: 1993, SOURCE: Materials Science and Engineering B, VOLUME: 17, ISSUE: 1-3
AUTHORS: Koynov, S; Schwarz, R; Fischer, T; Schorer, R;
PUBLISHED: 1993, SOURCE: Materials Science and Engineering B, VOLUME: 17, ISSUE: 1-3
INDEXED IN: Scopus
Scopus