Agustin Leobardo Herrera May
AuthID: R-00M-0CM
51
TITLE: Influence of nitrogen flow rate on the structure and hardness of Ti-Si-N-O thin films produced by reactive sputtering
AUTHORS: García-Gonzalez L.; Garnica-Romo M.G.; Hernández-Torres J.; Martínez-Castillo J.; García-Ramírez P.J.; Ángel-Sauceda A.; Agustin L. Herrera-May; Espinoza-Beltrán F.J.;
PUBLISHED: 2006, SOURCE: XXII Interamerican Congress of Chemical Engineering, CIIQ 2006 and V Argentinian Congress of Chemical Engineering, CAIQ 2006 - Innovation and Management for Sustainable Development
AUTHORS: García-Gonzalez L.; Garnica-Romo M.G.; Hernández-Torres J.; Martínez-Castillo J.; García-Ramírez P.J.; Ángel-Sauceda A.; Agustin L. Herrera-May; Espinoza-Beltrán F.J.;
PUBLISHED: 2006, SOURCE: XXII Interamerican Congress of Chemical Engineering, CIIQ 2006 and V Argentinian Congress of Chemical Engineering, CAIQ 2006 - Innovation and Management for Sustainable Development
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