131
TITLE: Amorphous and microcrystalline silicon deposited by hot-wire chemical vapor deposition at low substrate temperatures: application to devices and thin-film microelectromechanical systems  Full Text
AUTHORS: Conde, JP ; Alpuim, P ; Boucinha, M; Gaspar, J; Chu, V ;
PUBLISHED: 2001, SOURCE: 1st International Conference on Cat-CVD (Hot Wire CVD) Process in THIN SOLID FILMS, VOLUME: 395, ISSUE: 1-2
INDEXED IN: Scopus WOS CrossRef
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132
TITLE: Doping of amorphous and microcrystalline silicon films deposited at low substrate temperatures by hot-wire chemical vapor deposition
AUTHORS: Alpuim, P ; Chu, V ; Conde, JP ;
PUBLISHED: 2001, SOURCE: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, VOLUME: 19, ISSUE: 5
INDEXED IN: Scopus WOS CrossRef
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133
TITLE: Electromechanical properties of amorphous and microcrystalline silicon micromachined structures
AUTHORS: Gaspar, J; Boucinha, M; Chu, V; Conde, JP ;
PUBLISHED: 2001, SOURCE: Amorphous and Heterogeneous Silicon Based Films 2001 in Materials Research Society Symposium - Proceedings, VOLUME: 664
INDEXED IN: Scopus
134
TITLE: Piezoresistive sensors on plastic substrates using doped microcrystalline silicon
AUTHORS: Alpuim, P ; Chu, V; Conde, JP ;
PUBLISHED: 2001, SOURCE: Amorphous and Heterogeneous Silicon Based Films 2001 in Materials Research Society Symposium - Proceedings, VOLUME: 664
INDEXED IN: Scopus
135
TITLE: Sensitization of the electron lifetime in a-Si : H: The story of oxygen
AUTHORS: Balberg, I; Naidis, R; Fonseca, LF; Weisz, SZ; Conde, JP ; Alpuim, P ; Chu, V ;
PUBLISHED: 2001, SOURCE: PHYSICAL REVIEW B, VOLUME: 63, ISSUE: 11
INDEXED IN: Scopus WOS CrossRef
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136
TITLE: Silicon thin film deposition on nano-structured ZnO substrates
AUTHORS: Konenkamp, R; Chu, V; Conde, J ; Dloczik, L;
PUBLISHED: 2001, SOURCE: Amorphous and Heterogeneous Silicon Based Films 2001 in Materials Research Society Symposium - Proceedings, VOLUME: 664
INDEXED IN: Scopus
137
TITLE: Amorphous silicon air-gap resonators on large-area substrates  Full Text
AUTHORS: Boucinha, M; Brogueira, P ; Chu, V ; Conde, JP ;
PUBLISHED: 2000, SOURCE: APPLIED PHYSICS LETTERS, VOLUME: 77, ISSUE: 6
INDEXED IN: Scopus WOS CrossRef
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138
TITLE: Doping of amorphous and microcrystalline silicon films by hot-wire CVD and RFPECVD at low substrate temperatures on plastic substrates
AUTHORS: Alpuim, P ; Chu, V; Conde, JP ;
PUBLISHED: 2000, SOURCE: Amorphous and Heterogeneus Silicon Thin Films-2000 in Materials Research Society Symposium - Proceedings, VOLUME: 609
INDEXED IN: Scopus
139
TITLE: Light intensity exponents ns sensitive tools for the detection of impurities in a-Si:H
AUTHORS: Fonseca, LF; Weisz, SZ; Alpuim, P ; Chu, V; Conde, JP ; Naides, R; Balberg, I;
PUBLISHED: 2000, SOURCE: Amorphous and Heterogeneus Silicon Thin Films-2000 in Materials Research Society Symposium - Proceedings, VOLUME: 609
INDEXED IN: Scopus
140
TITLE: Low substrate temperature deposition of amorphous and microcrystalline silicon films on plastic substrates by hot-wire chemical vapor deposition  Full Text
AUTHORS: Alpuim, P ; Chu, V ; Conde, JP ;
PUBLISHED: 2000, SOURCE: 18th International Conference on Amorphous and Microcrystalline Semiconductors (ICAMS 18) in JOURNAL OF NON-CRYSTALLINE SOLIDS, VOLUME: 266
INDEXED IN: Scopus WOS CrossRef
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