Amorphous Silicon Air-Gap Resonators on Large-Area Substrates

AuthID
P-000-Z96
4
Author(s)
Boucinha, M
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Document Type
Article
Year published
2000
Published
in APPLIED PHYSICS LETTERS, ISSN: 0003-6951
Volume: 77, Issue: 6, Pages: 907-909 (3)
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Publication Identifiers
Scopus: 2-s2.0-0000459446
Wos: WOS:000088787300048
Source Identifiers
ISSN: 0003-6951
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