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TITLE: The influence of the deposition conditions on the mechanical properties of TI(C,O,N) thin films obtained by sputtering process
AUTHORS: Olteanu, C; Munteanu, A; Munteanu, D; Borcea, B; Vaz, F ; Cunha, L ;
PUBLISHED: 2009, SOURCE: Metalurgia International, VOLUME: 14, ISSUE: SPEC. ISS. 3
INDEXED IN: Scopus