B. Vitoux
AuthID: R-00G-1P5
1
TITLE: Effect of deposition conditions and dielectric plasma treatments on the electrical properties of microcrystalline silicon TFTs Full Text
AUTHORS: Kasouit, S; Roca i Cabarrocas, P; Vanderhaghen, R; Bonassieux, Y; Elyaakoubi, M; French, I; Rocha, J ; Vitoux, B;
PUBLISHED: 2003, SOURCE: E-MRS, K in Thin Solid Films, VOLUME: 427, ISSUE: 1-2
AUTHORS: Kasouit, S; Roca i Cabarrocas, P; Vanderhaghen, R; Bonassieux, Y; Elyaakoubi, M; French, I; Rocha, J ; Vitoux, B;
PUBLISHED: 2003, SOURCE: E-MRS, K in Thin Solid Films, VOLUME: 427, ISSUE: 1-2
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