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TITLE: A comparison between the use of EBIC and IBIC microscopy for semiconductor defect analysis  Full Text
AUTHORS: Breese, MBH; Amaku, A; Wilshaw, PR;
PUBLISHED: 1998, SOURCE: 13th International Conference on Ion Beam Analysis (IBA-13) in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, VOLUME: 136
INDEXED IN: Scopus WOS CrossRef