V. Le Huy
AuthID: R-00G-NM7
1
TITLE: Identification of fatigue crack extension process in zero-tension cyclic stress test of polysilicon films Full Text
AUTHORS: Le Huy, V; Kamiya, S; Gaspar, J; Paul, O;
PUBLISHED: 2012, SOURCE: 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
AUTHORS: Le Huy, V; Kamiya, S; Gaspar, J; Paul, O;
PUBLISHED: 2012, SOURCE: 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
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TITLE: IDENTIFICATION OF FATIGUE CRACK EXTENSION PROCESS IN ZERO-TENSION CYCLIC STRESS TEST OF POLYSILICON FILMS
AUTHORS: Huy, VL; Shoji Kamiya; Joao Gaspar; Oliver Paul;
PUBLISHED: 2012, SOURCE: 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) in 2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)
AUTHORS: Huy, VL; Shoji Kamiya; Joao Gaspar; Oliver Paul;
PUBLISHED: 2012, SOURCE: 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) in 2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)
INDEXED IN: 
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