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TITLE: An Alternative Approach to Investigate V-Shaped Electrothermal Microactuators in Vacuum  Full Text
AUTHORS: Gabriel de S. Gama; Claudia A A Coelho; Joao Gaspar; Paulo J P Freitas; Rubem L Sommer; Alexandre Mello;
PUBLISHED: 2020, SOURCE: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOLUME: 29, ISSUE: 3
INDEXED IN: Scopus WOS