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TITLE: Effect of copper content on the microstructure, morphology, and optical properties of ZrSiN coatings deposited using pulsed-direct current reactive magnetron sputtering  Full Text
AUTHORS: Vanegas, H. S.; Vallejo, F. F.; Calderon, S.; Olaya, J. J.; Alfonso, J. E.;
PUBLISHED: 2023, SOURCE: THIN SOLID FILMS, VOLUME: 784
INDEXED IN: Scopus WOS