Effect of Substrate Bias Voltage on Microstructure and Mechanical Properties of Cr-Nb-Ti-Zr-N-O Ceramic Thin Films Produced by Reactive Sputtering

AuthID
 P-00Y-TA1
4
Author(s)
Zamani Meymian, MR
·
Document Type
Article
Year published
2023
Published
in COATINGS
Volume: 13, Issue: 7
Indexing
Wos®
Scopus®
Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-85166226864
Wos: WOS:001038126600001
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