Effect of Hydrogen Incorporation on the Mechanical Properties of Dlc Films Deposited by Hipims in Doms Mode

AuthID
 P-00Z-0V0
6
Author(s)
Colaux, JL
·
Vahidi, A
·
Document Type
Article
Year published
2023
Published
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 473
Indexing
Wos®
Scopus®
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Publication Identifiers
Scopus: 2-s2.0-85169840869
Wos: WOS:001072565500001
Source Identifiers
ISSN: 0257-8972
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