Publications

AuthID
P-003-3TS

Author(s)

Muga, JG

Ruschhaupt, A

Document Type

Article

Year published

2010

Published

in SEMICONDUCTOR SCIENCE AND TECHNOLOGY, ISSN: 0268-1242

Volume: 25, Issue: 9, Pages: 095004 (4)

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Wos^®

Scopus^®

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Google Scholar^®

Publication Identifiers

DOI: 10.1088/0268-1242/25/9/095004

Scopus: 2-s2.0-78649357049

Wos: WOS:000281221200005

Source Identifiers

ISSN: 0268-1242

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