Design and Modeling of Polysilicon Electrothermal Actuators for a Mems Mirror with Low Power Consumption

AuthID
 P-00Z-GWR
7
Author(s)
Lara Castro, M
·
Herrera Amaya, A
·
Escarola Rosas, MA
·
Vázquez Toledo, M
·
López Huerta, F
·
Aguilera Cortés, LA
·
Document Type
Article
Year published
2017
Published
in MICROMACHINES, ISSN: 2072-666X
Volume: 8, Issue: 7, Pages: 203 (19)
Indexing
Wos®
Scopus®
Crossref®18
Pubmed®
Google Scholar®
Publication Identifiers
Pubmed: 30400394
Scopus: 2-s2.0-85021640223
Wos: WOS:000406697500007
Source Identifiers
ISSN: 2072-666X
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