Systematic Characterization of Low-Pressure Capacitively Coupled Hydrogen Discharges

AuthID
P-000-AJB
5
Author(s)
Salabas, A
·
Gousset, G
·
Document Type
Article
Year published
2004
Published
in JOURNAL OF APPLIED PHYSICS, ISSN: 0021-8979
Volume: 95, Issue: 9, Pages: 4605-4620 (16)
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Publication Identifiers
Scopus: 2-s2.0-2442491050
Wos: WOS:000220875400011
Source Identifiers
ISSN: 0021-8979
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