Properties Changes of Ti(C, O, N) Films Prepared by Pvd: the Effect of Reactive Gases Partial Pressure

AuthID
 P-003-HXH
7
Author(s)
·
Olteanu, C
·
Munteanu, D
·
Munteanu, A
Document Type
Article
Year published
2009
Published
in JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, ISSN: 1454-4164
Volume: 11, Issue: 7, Pages: 976-980 (5)
Indexing
Wos®
Scopus®
Publication Identifiers
Scopus: 2-s2.0-75949085292
Wos: WOS:000269052100011
Source Identifiers
ISSN: 1454-4164
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