Highly Conductive P-Type Nanocrystalline Silicon Films Deposited by Rf-Pecvd Using Silane and Trimethylboron Mixtures at High Pressure

AuthID
 P-003-J66
8
Author(s)
Bernacka Wojcik, I
·
Gaspar, C
·
Document Type
Article
Year published
2009
Published
in VACUUM, ISSN: 0042-207X
Volume: 83, Issue: 10, Pages: 1253-1256 (4)
Conference
5Th European Topical Conference on Hard Coating, Date: JUN 22-25, 2008, Location: Caparica, PORTUGAL
Indexing
Wos®
Scopus®
Crossref®
Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-67349209304
Wos: WOS:000267505100012
Source Identifiers
ISSN: 0042-207X
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