Publications

AuthID
P-015-8ZA

Author(s)

Gogova, D

Tran, DQ

Jokubavicius, V

Vines, L

Schubert, M

Yakimova, R

Paskov, PP

Darakchieva, V

Document Type

Article

Year published

2024

Published

in Journal of Vacuum Science & Technology A, ISSN: 0734-2101

Volume: 42, Issue: 2

Indexing

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Google Scholar^®

Publication Identifiers

DOI: 10.1116/6.0003424

Source Identifiers

ISSN: 0734-2101

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