Thickness Control of Coatings by Means of Modulated Ir Radiometry

AuthID
 P-003-RPE
7
Author(s)
·
Fotsing, JLN
·
Gibkes, J
·
Pelzl, J
·
Document Type
Article
Year published
2009
Published
in PLASMA PROCESSES AND POLYMERS, ISSN: 1612-8850
Volume: 6, Issue: SUPPL. 1, Pages: S592-S598 (7)
Conference
11Th International Conference on Plasma Surface Engineering, Date: SEP 15-19, 2008, Location: Garmisch Partenkirchen, GERMANY, Sponsors: European Joint Comm Plasma & Ion Surface Engn
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Publication Identifiers
Scopus: 2-s2.0-77950839387
Wos: WOS:000272302900115
Source Identifiers
ISSN: 1612-8850
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