Mems Microresonators Based on Nanocrystalline Silicon

AuthID
P-000-C88
4
Author(s)
5
Editor(s)
Ganguly, G; Kondo, M; Schiff, EA; Carius, R; Biswas, R
Document Type
Proceedings Paper
Year published
2004
Published
in AMORPHOUS AND NANOCRYSTALLINE SILICON SCIENCE AND TECHNOLOGY- 2004 in MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS, ISSN: 0272-9172
Volume: 808, Pages: 453-458 (6)
Conference
Symposium on Amorphous and Nanocrystalline Silicon Science and Technology Held at the 2004 Mrs Spring Meeting, Date: APR 13-16, 2004, Location: San Francisco, CA, Sponsors: Mat Res Soc
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Publication Identifiers
Scopus: 2-s2.0-12844276073
Wos: WOS:000224411600067
Source Identifiers
ISSN: 0272-9172
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