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Ion Beam Analysis of the Dry Thermal Oxidation of Thin Polycrystalline Sige Films

AuthID
P-000-178

Author(s)

Kling, A

Soares, JC

Prieto, AC

Jimenez, J

Rodriguez, A

Sangrador, J

Rodriguez, T

Document Type

Article

Year published

2005

Published

in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X

Volume: 240, Issue: 1-2, Pages: 405-408 (4)

Conference

8Th European Conference on Accelerators in Applied Research and Technology, Date: SEP 20-24, 2004, Location: Paris, FRANCE, Host: Natl Museum Folk Arts & Tradit

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Publication Identifiers

DOI: 10.1016/j.nimb.2005.06.137

Scopus: 2-s2.0-27344448405

Wos: WOS:000233208400079

Source Identifiers

ISSN: 0168-583X

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Ion Beam Analysis of the Dry Thermal Oxidation of Thin Polycrystalline Sige Films

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