Influence of the Chemical and Electronic Structure on the Electrical Behavior of Zirconium Oxynitride Films

AuthID
 P-003-ZDC
10
Author(s)
·
Rousselot, C
·
Espinos, JP
·
Document Type
Review
Year published
2008
Published
in JOURNAL OF APPLIED PHYSICS, ISSN: 0021-8979
Volume: 103, Issue: 10, Pages: 104907 (15)
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Publication Identifiers
Scopus: 2-s2.0-44649197117
Wos: WOS:000256303800139
Source Identifiers
ISSN: 0021-8979
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