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Defect Tailoring in Hfo
2
/Si Films upon Post-Deposition Annealing and Ultraviolet Irradiation
AuthID
P-018-79A
6
Author(s)
Salas Rodríguez, S
·
González Moreno, FI
·
Woo García, RM
·
Herrera May, AL
·
López Huerta, F
·
Caballero Briones, F
Document Type
Article
Year published
2025
Published
in
APPLIED SCIENCES-BASEL
Volume: 15, Issue: 3
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Publication Identifiers
DOI
:
10.3390/app15031573
Wos
: WOS:001418450700001
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