Defect Tailoring in Hfo2/Si Films upon Post-Deposition Annealing and Ultraviolet Irradiation

AuthID
 P-018-79C
6
Author(s)
Salas-Rodríguez, S
·
González-Moreno, FI
·
Woo-García, RM
·
López-Huerta, F
·
Caballero-Briones, F
Document Type
Article
Year published
2025
Published
in Applied Sciences
Volume: 15, Issue: 3, Pages: 1573
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