Discharge Diagnosis and Controlled Deposition of SnoX:F Films by Dc-Reactive Sputtering from a Metallic Tin Target

AuthID
P-018-MXR
8
Author(s)
Martel A.
·
Caballero-Briones F.
·
Fandiño J.
·
Castro-Rodríguez R.
·
Zapata-Navarro A.
·
Zapata-Torres M.
·
Peña J.L.
Document Type
Article
Year published
1999
Published
in Surface and Coatings Technology, ISSN: 02578972
Volume: 122, Issue: 2-3, Pages: 136-142 (6)
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Publication Identifiers
Scopus: 2-s2.0-0000182916
Source Identifiers
ISSN: 02578972
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