Quadrature Optical Interferometry Based In-Plane Displacement Measurement of a Mems Grating

AuthID
 P-018-TM1
6
Author(s)
Garcia, IS
·
Zalevsky, Z
·
Dias, RA
·
Alves, FS
·
2
Editor(s)
Busse,LE;Soskind,Y
Document Type
Proceedings Paper
Year published
2025
Published
in PHOTONIC INSTRUMENTATION ENGINEERING XII in Proceedings of SPIE, ISSN: 0277-786X
Volume: 13373
Conference
2025 Conference on Photonic Instrumentation Engineering, Date: JAN 27-30, 2025, Location: San Francisco, CA
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Publication Identifiers
Scopus: 2-s2.0-105004169742
Wos: WOS:001488199800004
Source Identifiers
ISSN: 0277-786X
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