High-Q Thin-Film Silicon Resonators Processed at Temperatures Below 110 Degrees C on Glass and Plastic Substrates

AuthID
P-000-D7P
3
Author(s)
Gaspar, J
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Document Type
Proceedings Paper
Year published
2004
Published
in MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST in PROCEEDINGS: IEEE MICRO ELECTRO MECHANICAL SYSTEMS WORKSHOP, ISSN: 1084-6999
Pages: 633-636 (4)
Conference
17Th Ieee International Conference on Micro Electro Mechanical Systems, Date: JAN 25-29, 2004, Location: Maastricht, NETHERLANDS, Sponsors: IEEE Robot & Automat Soc
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Publication Identifiers
Scopus: 2-s2.0-3042709857
Wos: WOS:000189435200157
Source Identifiers
ISSN: 1084-6999
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