A Low-Cost, Accurate and Non-Intercepting Continuous Method for Beam Current Measurements in a High-Current Ion Implanter

AuthID
 P-004-652
3
Author(s)
Rocha, J
·
Document Type
Article
Year published
2007
Published
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 265, Issue: 2, Pages: 576-580 (5)
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Publication Identifiers
Scopus: 2-s2.0-36448963433
Wos: WOS:000252001800019
Source Identifiers
ISSN: 0168-583X
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