Two-Step Resist Deposition of E-Beam Patterned Thick Py Nanostructures for X-Ray Microscopy

AuthID
P-01A-AF8
9
Author(s)
Hermosa, J
·
Quirós, C
·
Vélez, M
·
Sorrentino, A
·
Aballe, L
·
Pereiro, E
·
Ferrer, S
·
Martín, JI
Document Type
Article
Year published
2022
Published
in Micromachines
Volume: 13, Issue: 2, Pages: 204
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