Publications

AuthID
P-01A-B3D

Author(s)

Cunha, FM

Silva, MF

Document Type

Article

Year published

2026

Published

in MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, ISSN: 1369-8001

Volume: 202, Pages: 110182 (8)

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Publication Identifiers

DOI: 10.1016/j.mssp.2025.110182

Scopus: 2-s2.0-105019406383

Wos: WOS:001607423700006

Source Identifiers

ISSN: 1369-8001

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