On the Electrical Properties of Ald Hfo2 Dielectric Films for Mems Capacitive Switches

AuthID
 P-01A-GH7
6
Author(s)
Theocharis, J
·
Mahjoub, A
·
Eustache, E
·
Ziaei, A
·
Papaioannou, G
Document Type
Article
Year published
2025
Published
in MICROELECTRONICS RELIABILITY, ISSN: 0026-2714
Volume: 169, Pages: 115737 (7)
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Publication Identifiers
Wos: WOS:001471625100001
Source Identifiers
ISSN: 0026-2714
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