Flexural and Torsional Vibration Modes in Low Temperature Thin-Film Silicon Paddle Microresonators

AuthID
 P-004-9E0
3
Author(s)
·
Document Type
Article
Year published
2007
Published
in APPLIED PHYSICS LETTERS, ISSN: 0003-6951
Volume: 90, Issue: 23, Pages: 233502 (3)
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Publication Identifiers
Scopus: 2-s2.0-34250701605
Wos: WOS:000247145500079
Source Identifiers
ISSN: 0003-6951
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