Composition-Dependent Optical Properties and Dielectric Function Modeling of Pecvd-Grown Hydrogenated Amorphous Silicon Carbonitride Thin Films

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 P-01A-YGD
4
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Article
Year published
2026
Published
in Optical Materials, ISSN: 0925-3467
Pages: 117903
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ISSN: 0925-3467
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