Two-Dimensional Electromagnetic Model of a Microwave Plasma Reactor Operated by an Axial Injection Torch

AuthID
P-004-A3G
2
Author(s)
Alvarez, R
·
Document Type
Article
Year published
2007
Published
in JOURNAL OF APPLIED PHYSICS, ISSN: 0021-8979
Volume: 101, Issue: 10
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Publication Identifiers
Scopus: 2-s2.0-34249873000
Wos: WOS:000246891500016
Source Identifiers
ISSN: 0021-8979
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