Performance of Thin Film Silicon Mems on Flexible Plastic Substrates

AuthID
P-004-CE4
3
Author(s)
5
Editor(s)
Chu, V; Miyazaki, S; Nathan, A; Yang, J; Zan, HW
Document Type
Proceedings Paper
Year published
2007
Published
in AMORPHOUS AND POLYCRYSTALLINE THIN-FILM SILICON SCIENCE AND TECHNOLOGY 2007 in MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS, ISSN: 0272-9172
Volume: 989, Pages: 219-224 (6)
Conference
Symposium on Amorphous and Polycrystalline Thin-Film Silicon Science and Technology Held at the 2007 Mrs Spring Meeting, Date: APR 09-13, 2007, Location: San Francisco, CA, Sponsors: Mat Res Soc
Indexing
Publication Identifiers
Scopus: 2-s2.0-41549153438
Wos: WOS:000251293300033
Source Identifiers
ISSN: 0272-9172
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