Electrostatically Actuated Polymer Microresonators

AuthID
P-000-1DC
4
Author(s)
Zhang, G
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·
Document Type
Article
Year published
2005
Published
in APPLIED PHYSICS LETTERS, ISSN: 0003-6951
Volume: 87, Issue: 10, Pages: 104104 (3)
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Publication Identifiers
Scopus: 2-s2.0-24644478502
Wos: WOS:000231614800073
Source Identifiers
ISSN: 0003-6951
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