Large-Scale Ar and N-2-Ar Microwave Plasma Sources

AuthID
P-004-JMP
Document Type
Article
Year published
2006
Published
in JOURNAL OF PHYSICS D-APPLIED PHYSICS, ISSN: 0022-3727
Volume: 39, Issue: 13, Pages: 2747-2753 (7)
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Publication Identifiers
Scopus: 2-s2.0-33745319471
Wos: WOS:000238674100020
Source Identifiers
ISSN: 0022-3727
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