Annealing Behavior and Lattice Site Location of Er Implanted Ingan

AuthID
P-000-GY1
6
Author(s)
De Vries, B
·
Vantomme, A
4
Editor(s)
Gamo,K;Ohdomari,I;Itoh,H;Iwaki,M
Document Type
Article
Year published
2003
Published
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 206, Pages: 1042-1046 (5)
Conference
13Th International Conference on Ion Beam Modification of Materials, Date: SEP 01-06, 2002, Location: KOBE, JAPAN
Indexing
Publication Identifiers
Scopus: 2-s2.0-0037566895
Wos: WOS:000183690500222
Source Identifiers
ISSN: 0168-583X
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