Low-Temperature Thin-Film Silicon Mems

AuthID
P-000-HDW
3
Author(s)
1
Editor(s)
Roca i Cabarrocas PFortunato GRobertson JStutzmann M
Document Type
Article
Year published
2003
Published
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 427, Issue: 1-2, Pages: 181-186 (6)
Conference
4Th Symposium on Thin Films for Large Area Electronics Held at the Emrs 2002 Spring Conference, Date: JUN 18-21, 2002, Location: STRASBOURG, FRANCE, Sponsors: European Mat Res Soc
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Publication Identifiers
Scopus: 2-s2.0-0037416759
Wos: WOS:000182573200036
Source Identifiers
ISSN: 0040-6090
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