A Cross-Corner Effect in a Rectangular Sputtering Magnetron

AuthID
P-000-HS6
3
Author(s)
Document Type
Article
Year published
2003
Published
in JOURNAL OF PHYSICS D-APPLIED PHYSICS, ISSN: 0022-3727
Volume: 36, Issue: 3, Pages: 244-251 (8)
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Publication Identifiers
Scopus: 2-s2.0-0037423503
Wos: WOS:000181103600008
Source Identifiers
ISSN: 0022-3727
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