Polymorphous Silicon Films Produced in Large Area Reactors by Pecvd at 27.12 Mhz and 13.56 Mhz

AuthID
P-000-J4M
5
Editor(s)
Abelson, JR; Ganguly, G; Matsumura, H; Robertson, J; Schiff, EA
Document Type
Proceedings Paper
Year published
2003
Published
in AMORPHOUS AND NANOCRYSTALLINE SILICON-BASED FILMS-2003 in MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS, ISSN: 0272-9172
Volume: 762, Pages: 589-594 (6)
Conference
Symposium on Amorphous and Nanocrystalline Silicon-Based Films Held at the 2003 Mrs Spring Meeting, Date: APR 22-25, 2003, Location: SAN FRANCISCO, CA, Sponsors: Mat Res Soc, BP Solar Inc, MVSystems, Natl Renewable Energy Lab, Sanyo Elect Co Ltd, United Solar Syst Corp, Voltaix Inc, Xerox PARC
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Publication Identifiers
Scopus: 2-s2.0-1642479923
Wos: WOS:000187620100089
Source Identifiers
ISSN: 0272-9172
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