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Development of Tantalum Oxynitride Thin Films Produced by Pvd: Study of Structural Stability
AuthID
P-006-68F
7
Author(s)
Cristea, D
·
Crisan, A
·
Barradas, NP
·
Alves, E
·
Moura, C
·
Vaz, F
·
Cunha, L
Document Type
Article
Year published
2013
Published
in
APPLIED SURFACE SCIENCE,
ISSN: 0169-4332
Volume: 285, Issue: PARTA, Pages: 19-26 (8)
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Publication Identifiers
DOI
:
10.1016/j.apsusc.2013.06.061
Scopus
: 2-s2.0-84886087891
Wos
: WOS:000325960900004
Source Identifiers
ISSN
: 0169-4332
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