Atomistic Model of Ultra-Smooth Amorphous Thin Film Growth by Low-Energy Ion-Assisted Physical Vapour Deposition

AuthID
P-006-6N9
6
Author(s)
Vazquez, L
·
Gago, R
·
Cotrino, J
·
Palmero, A
Document Type
Article
Year published
2013
Published
in JOURNAL OF PHYSICS D-APPLIED PHYSICS, ISSN: 0022-3727
Volume: 46, Issue: 39, Pages: 395303 (8)
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Publication Identifiers
Scopus: 2-s2.0-84884684500
Wos: WOS:000324810400012
Source Identifiers
ISSN: 0022-3727
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