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Charged Particle Transport Modelling in Silane-Hydrogen Radio-Frequency Capacitively Coupled Discharges

AuthID
P-000-M16

Author(s)

Salabas, A

Gousset, G

Alves, LL

Document Type

Article

Year published

2002

Published

in VACUUM, ISSN: 0042-207X

Volume: 69, Issue: 1-3, Pages: 213-219 (7)

Conference

12Th International School on Vacuum, Electron and Ion Technologies, Date: SEP 17-21, 2001, Location: VARNA, BULGARIA, Sponsors: Bulgarian Acad Sci, Inst Electr, Inst Ion Beam Phys & Mat Res, Res Ctr Rossendorf, Fdn Evrika

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Publication Identifiers

DOI: 10.1016/s0042-207x(02)00334-2

Scopus: 2-s2.0-0037168619

Wos: WOS:000180739000034

Source Identifiers

ISSN: 0042-207X

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Charged Particle Transport Modelling in Silane-Hydrogen Radio-Frequency Capacitively Coupled Discharges

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