The Depth Profile Analysis of W-Si-N Coatings After Thermal Annealing

AuthID
 P-000-M3J
6
Author(s)
Smid, P
·
Musil, J
·
Vlcek, J
Document Type
Article
Year published
2002
Published
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 161, Issue: 2-3, Pages: 111-119 (9)
Indexing
Wos®
Scopus®
Crossref®11
Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-0037010577
Wos: WOS:000178695400002
Source Identifiers
ISSN: 0257-8972
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