Amorphous Silicon-Carbon Alloys and Amorphous Carbon from Direct Methane and Ethylene Activation by Ecr

AuthID
 P-007-7NX
5
Author(s)
Giorgis, F
·
Pirri, CF
·
Arekat, S
Document Type
Proceedings Paper
Year published
1997
Published
in Materials Research Society Symposium - Proceedings, ISSN: 0272-9172
Volume: 467, Pages: 627-632
Conference
Proceedings of the 1997 Mrs Spring Symposium, Date: 31 March 1997 through 4 April 1997, Location: San Francisco, CA, USA, Sponsors: MRS
Indexing
Scopus®
Publication Identifiers
Scopus: 2-s2.0-0031351338
Source Identifiers
ISSN: 0272-9172
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