Effects of Ion Bombardment on Properties of D.c. Sputtered Superhard (Ti, Si, Al)N Nanocomposite Coatings

AuthID
P-000-Q8X
7
Author(s)
Document Type
Article
Year published
2002
Published
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 151, Pages: 515-520 (6)
Conference
Spring Meeting of the European-Materials-Research-Society, Date: JUN 05-08, 2001, Location: STRASBOURG, FRANCE, Sponsors: European Mat Res Soc
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Publication Identifiers
Scopus: 2-s2.0-0036496671
Wos: WOS:000174011400099
Source Identifiers
ISSN: 0257-8972
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